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Effects of feature orientation in tomographic reconstructions
被引：2
作者：
Kalukin, AR
[1
]
Levine, ZH
[1
]
Frigo, SP
[1
]
McNulty, I
[1
]
Kuhn, M
[1
]
机构：
[1] Rensselaer Polytech Inst, Dept Phys, Troy, NY 12180 USA
来源：
X-RAY MICROFOCUSING: APPLICATIONS AND TECHNIQUES
|
1998年
/
3449卷
关键词：
x-ray imaging;
nanotomography;
artifact;
interconnect;
x-ray microscopy;
STXM;
image reconstruction;
tomography;
D O I：
10.1117/12.330353
中图分类号：
O43 [光学];
学科分类号：
070207 ;
0803 ;
摘要：
We performed an x-ray nanotomography experiment at the Advanced Photon Source for the purpose of making a three-dimensional image of a sample containing an integrated circuit interconnect. Nine projections of the sample were made over an angular range of 140 degrees using 1573 eV photons and a scanning transmission x-ray microscope having a focal spot size of about 150 nm. Reconstructions of experimental and simulated data, using a Simultaneous Iterative Reconstruction Technique, show that a sample that is highly opaque along certain lines of sight must be strategically oriented with respect to the rotation axis to minimize the attenuation of photons through the sample and maximize the contrast in each image.
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页码：36 / 44
页数：9
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