Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

被引：30

作者：

Tang, IT

Chen, HJ

Hwang, WC

Wang, YC

Houng, MP

Wang, YH

机构：

[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 701, Taiwan

[2] Nanowin Tech Co Ltd, Tainan 701, Taiwan

[3] Chinese Mil Acad, Dept Phys, Kaohsiung, Taiwan

来源：

JOURNAL OF CRYSTAL GROWTH | 2004年 / 262卷 / 1-4期

关键词：

substrate; chemical vapor deposition processes; zinc compounds; piezoelectric material; semiconducting silicon; filters;

D O I：

10.1016/j.jcrysgro.2003.10.081

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

The applications of surface acoustic wave (SAW) devices aim directly at piezoelectric thin films deposited onto amorphous diamond-like carbon (DLC) coated on silicon substrates from target ZnO in this study. Our high-velocity SAW filters are characterized using multi-layer structures of thin films by DLC depositing. However, if propagating velocity of diamond is much higher, then the SAW phase velocity of piezoelectric thin film ZnO deposited on DLC coated onto Si substrate is raised from 2800 to11430m/s. Consequently, the GHz-band SAW devices could be fabricated using thin films of DLC without sub-micron photolithography technology. We have been also successfully fabricated and demonstrated the diamond-like SAW filters by evaporating interdigital transducers on ZnO thin films with ULSI technology. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：461 / 466

页数：6

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