Comparison study of ITO thin films deposited by sputtering at room temperature onto polymer and glass substrates

被引：146

作者：

Guillén, C ^{[1
]}

Herrero, J ^{[1
]}

机构：

[1] CIEMAT, Dep Energias Renovables, E-28040 Madrid, Spain

来源：

THIN SOLID FILMS | 2005年 / 480卷

关键词：

ITO; polymer; structure; morphology; optical properties;

D O I：

10.1016/j.tsf.2004.11.040

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Indium tin oxide (ITO) thin films have been grown simultaneously onto glass and polymer substrates at room temperature by sputtering from ceramic target. The structure, morphology and electro-optical characteristics of the ITO/glass and ITO/polymer samples have been analyzed by X-ray diffraction, atomic force microscopy, four-point electrical measurements and spectrophotometry. In the selected experimental conditions, the polycrystalline ITO coating shows higher average grain size and higher conductivity, with similar visible transmittance, onto the polymer than onto the glass substrate. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：129 / 132

页数：4

共 21 条

[1]

[Anonymous], P 2 WORLD C EXH PHOT

[2] Influence of energetic bombardment on stress, resistivity, and microstructure of indium tin oxide films grown by radio frequency magnetron sputtering on flexible polyester substrates [J].

Carcia, PF ;

McLean, RS ;

Reilly, MH ;

Li, ZG ;

Pillione, LJ ;

Messier, RF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (03) :745-751

[3]

COUTTS TJ, 1998, P 2 WORLD C PHOT SOL, P720

[4] Properties of ITO films deposited by r.f.-PERTE on unheated polymer substrates-dependence on oxygen partial pressure [J].

de Carvalho, CN ;

Lavareda, G ;

Fortunato, E ;

Amaral, A .

THIN SOLID FILMS, 2003, 427 (1-2) :215-218

[5] Transparent and conducting ITO films:: new developments and applications [J].

Granqvist, CG ;

Hultåker, A .

THIN SOLID FILMS, 2002, 411 (01) :1-5

[6] Transparent films on polymers for photovoltaic applications [J].

Herrero, J ;

Guillén, C .

VACUUM, 2002, 67 (3-4) :611-616

[7] Structure and electrical properties of ITO thin films deposited at high rate by facing target sputtering [J].

Hoshi, Y ;

Kato, H ;

Funatsu, K .

THIN SOLID FILMS, 2003, 445 (02) :245-250

[8] Electrical and structural properties of indium tin oxide films prepared by pulsed laser deposition [J].

Izumi, H ;

Adurodija, FO ;

Kaneyoshi, T ;

Ishihara, T ;

Yoshioka, H ;

Motoyama, M .

JOURNAL OF APPLIED PHYSICS, 2002, 91 (03) :1213-1218

[9]

Kampmann A, 1999, PROG PHOTOVOLTAICS, V7, P129, DOI 10.1002/(SICI)1099-159X(199903/04)7:2<129::AID-PIP252>3.0.CO

[10]

2-R

← 1 2 3 →