Effect of Si-incorporation on wear-corrosion properties of diamond-like carbon films

被引：51

作者：

Kim, HG

Ahn, SH

Kim, JG

Park, SJ

Lee, KR

机构：

[1] Sungkyunkwan Univ, Dept Adv Mat Engn, Suwon 440746, South Korea

[2] Korea Adv Inst Sci & Technol, Future Technol Res Div, Seoul 130650, South Korea

来源：

THIN SOLID FILMS | 2005年 / 482卷 / 1-2期

关键词：

diamond-like carbon; wear; corrosion;

D O I：

10.1016/j.tsf.2004.11.164

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Si incorporated diamond-like carbon (Si-DLC) films ranging from 0 to 2 at.% contents were deposited on STS 316L substrates for orthopedic implants by means of rf plasma-assisted chemical vapor deposition (rf PACVD) technique, using mixtures of benzene (C6H6) and silane (SiH4) as the precursor gases. This study provides the reliable and quantitative data for assessment of the effect of Si incorporation on wear-corrosion properties in the simulated body fluid environment through the tribological and electrochemical test. It was found that wear and corrosion to resistance of Si-DLC coatings with increasing Si content were improved owing to high sp(3) bonding. (c) 2004 Elsevier B.V All rights reserved.

引用

页码：299 / 304

页数：6

共 11 条

[1] Deposition of Si-DLC films with high hardness, low stress and high deposition rates [J].