The microstructure of eutectic Au-Sn solder bumps on Cu/electroless Ni/Au

被引:65
作者
Song, HG [1 ]
Ahn, JP
Morris, JW
机构
[1] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA
[2] Ctr Adv Mat, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA
[3] Natl Ctr Electron Microscopy, Lawrence Berkeley Natl Lab, Berkeley, CA USA
关键词
Au-Sn solder; electroless Ni/Au metallization; Au-Ni-Sn compounds;
D O I
10.1007/s11664-001-0133-9
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work we studied the initial microstructure and microstructural evolution of eutectic Au-Sn solder bumps on Cu/electroless Ni/Au. The solder bumps were 150-160 mum in diameter and 45-50 mum tall, reflowed on Cu/electroless Ni/Au, and then aged at 200 degreesC for up to 365 days. In addition, Au-Ni-Sn-alloys were made and analyzed to help identify the phases that appear at the interface during aging. The detailed interfacial microstructure was observed using a transmission electron microscope (TEM). The results show that the introduction of Au from the substrate produces large islands of zeta -phase in the bulk microstructure during reflow. Two Au-Ni-Sn compounds are formed at the solder/substrate interface and grow slowly during aging. The maximum solubility of Ni in the phase was measured to be about 1 at.% at 200 degreesC, while Ni in the delta -phase is more than 20 at.%. The electroless Ni layer is made of several sublayers with slightly different compositions and microstructures. There is, in addition, an amorphous interaction layer at the solder/electroless Ni interface.
引用
收藏
页码:1083 / 1087
页数:5
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