Indirect tip fabrication for scanning probe microscopy

Different fabrication technologies for Scanning Probe Microscopy tips have been investigated, using the so called mould technique. By a combination of reactive ion etching and wet anisotropic etching novel, high aspect ratio tip moulds have been produced in silicon. The resulting tip shapes are investigated by electroplating a nickel layer on the silicon substrate, whereafter the silicon is removed, yielding conductive tips, which can be used for Atomic Force Microscopy as well as Scanning Tunnelling Microscopy.