Nonequilibrium positive column revisited

被引:12
作者
Alves, LL [1 ]
Gousset, G
Vallée, S
机构
[1] Inst Super Tecn, Ctr Fis Plasmas, P-1096 Lisbon, Portugal
[2] Univ Paris 11, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
关键词
DC-positive column; fluid modeling; helium; non-local regime;
D O I
10.1109/TPS.2003.815484
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The paper presents a fluid modeling of the nonequilibrium, dc-positive column of cylindrical gas discharges, by using a robust numerical code that describes the transport of electrons and positive ions, over a broad-domain of pressures p similar or equal to100 mtorr-10 torr and discharge currents I-dc similar or equal to 5-200 mA. The model writes the continuity and momentum transfer equations for electrons And ions, coupled with Poisson's equation and the electron-mean energy transport equations, and adopts adequate boundary conditions for the particle fluxes At the wall. The electron transport parameters and rate coefficients are calculated using the local mean energy approximation in articulation with A two-term Boltzmann solver. For coherence, the electron transport equations and boundary conditions are deduced in the same two-term approximation framework, which induces some specific features when writing the mean energy transport equations. The model equations are. integrated from the discharge axis, to the wall, passing through the space-charge, sheath and monitoring the charge separation within it. An eigenvalue formulation is adopted to find a univocal solution to the particle, and energy balance equations. The model is solved for pure helium dc discharges, as an application example. The results obtained allow a systematic study of the discharge energy deposition and sheath formation, leading to a general criterion defining the transition region in pressure between nonlocal and local regimes.
引用
收藏
页码:572 / 586
页数:15
相关论文
共 51 条
[1]   ELECTRON KINETICS IN WEAKLY IONIZED HELIUM UNDER DC AND HF APPLIED ELECTRIC-FIELDS [J].
ALVES, LL ;
FERREIRA, CM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1991, 24 (04) :581-592
[2]   Nonlocal electron kinetics in DC discharges [J].
Alves, LL ;
Gousset, G ;
Ferreira, CM .
JOURNAL DE PHYSIQUE IV, 1997, 7 (C4) :143-154
[3]   A COLLISIONAL-RADIATIVE MODEL FOR MICROWAVE DISCHARGES IN HELIUM AT LOW AND INTERMEDIATE PRESSURES [J].
ALVES, LL ;
GOUSSET, G ;
FERREIRA, CM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1992, 25 (12) :1713-1732
[4]   Self-contained solution to the spatially inhomogeneous electron Boltzmann equation in a cylindrical plasma positive column [J].
Alves, LL ;
Gousset, G ;
Ferreira, CM .
PHYSICAL REVIEW E, 1997, 55 (01) :890-906
[5]  
ALVES LL, 2001, P 15 ISPC INT S PLAS, V4, P1251
[6]  
[Anonymous], 1956, HDB PHYS
[7]   ELECTRON ENERGY DISTRIBUTIONS IN STATIONARY DISCHARGES [J].
BERNSTEIN, IB ;
HOLSTEIN, T .
PHYSICAL REVIEW, 1954, 94 (06) :1475-1482
[8]   NUMERICAL-MODEL OF RF GLOW-DISCHARGES [J].
BOEUF, JP .
PHYSICAL REVIEW A, 1987, 36 (06) :2782-2792
[9]  
BOHM D, 1949, CHARACTERISTICS ELEC, P77
[10]  
BROWN SC, 1967, ELECT IONS WAVES SEL, P163