An Array waveguide sensor for artificial optical skins

被引：8

作者：

Missinne, Jeroen ^{[1
]}

Van Steenberge, Geert ^{[1
]}

Van Hoe, Bram ^{[1
]}

Van Coillie, Kristof ^{[1
]}

Van Gijseghem, Tim ^{[2
]}

Dubruel, Peter ^{[2
]}

Vanfleteren, Jan ^{[1
]}

Van Daele, Peter ^{[3
]}

机构：

[1] Univ Ghent, IMEC, ELIS Dept, Ctr Microsyst Technol, Technol Pk 914A, B-9052 Zwijnaarde, Belgium

[2] Univ Ghent, Polymer Chem & Biomat Res Grp, B-9000 Ghent, Belgium

[3] Univ Ghent, IMEC, Ctr Microsyst Technol, INTEC Dept, B-9052 Zwijnaarde, Belgium

来源：

PHOTONICS PACKAGING, INTEGRATION, AND INTERCONNECTS IX | 2009年 / 7221卷

关键词：

artificial optical skin; array waveguide sensor; embossing; polymer waveguides; silicone waveguides;

D O I：

10.1117/12.809154

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a concept for an artificial optical skin, a flexible foil in which a novel type of optical force sensing elements is integrated. The principle relies on the change in coupling between two arrays of crossing polymer waveguides separated by a thin layer of soft silicone. When the exerted pressure is increasing, the distance between the waveguides decreases and consequently power is transmitted from one to another. A process flow to produce a proof of principle demonstrator with arrays of Truemode (TM) waveguides embedded in silicone is described. In a second approach also the waveguides are fabricated in silicone using an embossing technique.

引用

页数：9

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