59-nm trimming of center wavelength of ARROW-type vertical coupler filter by UV irradiation

被引:6
作者
Sato, S [1 ]
Pan, W
Chu, ST
Endo, S
Suzuki, S
Kokubun, Y
机构
[1] Kanagawa Acad Sci & Technol, 3D Microphoton Project, Takatsu Ku, Kawasaki, Kanagawa 2130012, Japan
[2] Yokohama Natl Univ, Dept Elect & Comp Engn, Hodogaya Ku, Yokohama, Kanagawa 2408501, Japan
关键词
optical filter; center wavelength trimming; polysilane; waveguide; integrated optics;
D O I
10.1109/68.748234
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An antiresonant reflecting optical waveguide (ARROW)-type vertical coupler filter (VCF) with a polysilane cover layer is designed and fabricated to demonstrate the trimming of the center wavelength of the filter by ultraviolet (UV) irradiation. The propagation constant of the upper waveguide of the VCF was modified by UV irradiation on the polysilane cover in the presence of oxygen, The refractive index of polysilane can be adjusted from 1.448 to 1.427 by the exposure time of the UV irradiation, A nide trimming range of 59 nm (1567.5 nm to 1508.8 nm) of center wavelength is demonstrated.
引用
收藏
页码:358 / 360
页数:3
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