SAW COM-parameter extraction in A1N/Diamond layered structures

被引：37

作者：

Iriarte, GF ^{[1
]}

Engelmark, F ^{[1
]}

Katardjiev, IV ^{[1
]}

Plessky, V ^{[1
]}

Yantchev, V ^{[1
]}

机构：

[1] Uppsala Univ, Angstrom Lab, Uppsala, Sweden

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2003年 / 50卷 / 11期

关键词：

D O I：

10.1109/TUFFC.2003.1251137

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Highly c-axis oriented aluminum nitride (AIN) thin piezoelectric films have been grown on polycrystalline diamond substrates by pulsed direct current (DC) magnetron reactive sputter-deposition. The films were deposited at a substrate temperature below 50 C (room temperature) and had a typical full width half maximum (FWHM) value of the rocking curve of the AlN-002-peak of 2.1 degrees. A variety of one-port surface acoustic wave (SAW) resonators have been designed and fabricated on top of the AIN films. The measurements indicate that various SAW modes are excited. The SAW phase velocities of up to 11.800 m/s have been measured. These results are in agreement with calculated dispersion curves of the AIN/diamond structure. Finally, the coupling of modes parameters have been extracted from S-11 measurements using curve fitting for the first SAW mode, which indicate an effective coupling K-2 of 0.91% and a Q factor of about 600 at a frequency of 1050 MHz.

引用

页码：1542 / 1547

页数：6

共 25 条

[1] PC SOFTWARE FOR SAW PROPAGATION IN ANISOTROPIC MULTILAYERS [J].