Binary-phase zone-plate arrays based on hybrid solgel glass

被引：42

作者：

Rantala, JT ^{[1
]}

Äyräs, P ^{[1
]}

Levy, R ^{[1
]}

Honkanen, S ^{[1
]}

Descour, MR ^{[1
]}

Peyghambarian, N ^{[1
]}

机构：

[1] Univ Arizona, Ctr Opt Sci, Tucson, AZ 85721 USA

来源：

OPTICS LETTERS | 1998年 / 23卷 / 24期

关键词：

D O I：

10.1364/OL.23.001939

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An organically modified silane zirconate-based solgel material is used for the fabrication of binary-phase zone-plate arrays. The synthesized hybrid solgel material has a negative tone under UV exposure and can be patterned by a UV-lithography process. The transmittance of the material is nearly 100%, and the refractive index is 1.52. Two different diffractive lens arrays with focal lengths of 5 and 42 cm have been fabricated. The average roughness of the zone surface is less than 20 nm. The diffraction efficiencies of the lens arrays are measured as a function of modulation depth and exposure dose. A diffraction efficiency of 30% is achieved. (C) 1998 Optical Society of America.

引用

页码：1939 / 1941

页数：3

共 14 条

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