Nanofabrication via atom optics with chromium

被引:8
作者
McClelland, JJ
Anderson, WR
Celotta, RJ
机构
来源
ATOM OPTICS | 1997年 / 2995卷
关键词
atom optics; atom lithography; laser-focused atomic deposition; light forces; atom manipulation; nanostructures; nanofabrication; chromium; magnetic nanostructures;
D O I
10.1117/12.273745
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Through the use of light forces exerted by near-resonant laser light, chromium atoms are focused as they deposit onto a substrate, forming nanometer-scale structures on the surface. The laser light is in the form of a standing wave, in which each node acts as an atom-optical ''lens.'' The result is a highly accurate array of lines with a periodicity of lambda/2 = 212.78 nm and full-width at half maximum as small as 38 nm. We discuss progress with this process, in particular the fabrication of a two-dimensional array, the creation of an array with lambda/8 periodicity, the replication of the array in polymer material, the production of magnetic nanowires, and the reactive-ion etching of a chromium pattern on silicon to generate an array of distinct nanowires and/or nanotrenches.
引用
收藏
页码:90 / 96
页数:7
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