Aluminum-coated hollow glass fibers for ArF-excimer laser light fabricated by metallorganic chemical-vapor deposition

被引：22

作者：

Matsuura, Y ^{[1
]}

Miyagi, M ^{[1
]}

机构：

[1] Tohoku Univ, Dept Elect Commun, Sendai, Miyagi 9808579, Japan

来源：

APPLIED OPTICS | 1999年 / 38卷 / 12期

关键词：

D O I：

10.1364/AO.38.002458

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A hollow fiber composed of a glass capillary tube and a metal thin film upon the inside of the tube is proposed for the delivery of ArF-excimer laser light. From theoretical analysis, aluminum is chosen as the metal layer. A thin aluminum film is deposited by metallorganic chemical-vapor deposition, with dimethylethylamine alane employed as the source material. Measured loss spectra in vacuum-ultraviolet and ultraviolet regions and losses for ArF-excimer laser light show the low-loss property of the aluminum-coated fiber at the 193-nm wavelength of ArF-excimer laser light. The straight loss of the l-m long, l-mm-bore fiber is 1.0 dB. (C) 1999 Optical Society of America.

引用

页码：2458 / 2462

页数：5

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