Variation of the complex refractive indices with Sb-addition in Ge-Sb-Te alloy and their wavelength dependence

被引：31

作者：

Kim, SY ^{[1
]}

Kim, SJ ^{[1
]}

Seo, H ^{[1
]}

Kim, MR ^{[1
]}

机构：

[1] Ajou Univ, Dept Phys, Suwon 442749, South Korea

来源：

OPTICAL DATA STORAGE '98 | 1998年 / 3401卷

关键词：

phase-change optical disk; spectroscopic ellipsometry; complex refractive index; Ge-Sb-Te alloy;

D O I：

10.1117/12.327935

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The complex refractive index of phase-change Ge2Sb2+xTe5 media fabricated by DC magnetron sputtering has been determined by using spectroscopic ellipsometry and atomic force microscopy. The composition of Ge2Sb2+xTe5 analyzed by Inductively Coupled Plasma/Atomic Emission Spectrometer and X-ray Fluorescence was in the range 0.08 less than or equal to x less than or equal to 0.58. The complex refractive index and the reflectivity have been verified nearly constant with Sb-addition at 780 nn, 650 nm, and 410 nm, respectively.

引用

页码：112 / 115

页数：4