Fabrication of PTFE thin films by dual catalytic chemical vapor deposition method

被引：30

作者：

Yasuoka, Hiroaki ^{[1
]}

Yoshida, Masahiro ^{[1
]}

Sugita, Ken ^{[1
]}

Ohdaira, Keisuke ^{[1
]}

Murata, Hideyuki ^{[1
]}

Matsumura, Hideki ^{[1
]}

机构：

[1] Japan Adv Inst Sci & Technol, Sch Mat Sci, Nomi, Ishikawa 9231292, Japan

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 05期

关键词：

catalysis; chemical vapor deposition (CVD); polytetrafluoroethylene (PTFE); hexafluoropropylene-oxide (HFPO); catalyzer; catalyst;

D O I：

10.1016/j.tsf.2007.06.185

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Dependence of catalyzing materials on deposition of polytetrafluoroethylene (PTFE = "Teflon" in commercial) films by catalytic chemical vapor deposition (Cat-CVD) method is investigated. It has been clarified that Ni-containing catalyzers has a catalyzing effect that can decompose hexafluoropropylene-oxide (HFPO) to form PTFE films. A novel method named Dual Cat-CVD is also proposed. In the method, carbonized and fluorinated surface of Ni-containing catalyzer is removed and refreshed using atomic hydrogen generated by additionally introduced tungsten (W) catalyzer in the same chamber. This Dual Cat-CVD method enables to recover the deposition rate of PTFE films drastically. (c) 2007 Elsevier B.V All rights reserved.

引用

页码：687 / 690

页数：4

共 6 条

[1]

*ICI, PHYS PROP UNFILL FIL, P24

[2] Structure and morphology of fluorocarbon films grown by hot filament chemical vapor deposition [J].

Lau, KKS ;

Caulfield, JA ;

Gleason, KK .

CHEMISTRY OF MATERIALS, 2000, 12 (10) :3032-3037

[3] INFRARED SPECTRA OF HIGH POLYMERS .3. POLYTETRAFLUOROETHYLENE AND POLYCHLOROTRIFLUOROETHYLENE [J].

LIANG, CY ;

KRIMM, S .

JOURNAL OF CHEMICAL PHYSICS, 1956, 25 (03) :563-571

[4] THE MOLECULAR STRUCTURE OF PERFLUOROCARBON POLYMERS - INFRARED STUDIES ON POLYTETRAFLUOROETHYLENE [J].

MOYNIHAN, RE .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1959, 81 (05) :1045-1050

[5] Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH4/H2 system [J].

Umemoto, H ;

Ohara, K ;

Morita, D ;

Nozaki, Y ;

Masuda, A ;

Matsumura, H .

JOURNAL OF APPLIED PHYSICS, 2002, 91 (03) :1650-1656

[6]

WAGNER CD, 2004, NIST XRAY PHOTOELECT

← 1 →