Diffusion-controlled growth of semiconductor nanowires: Vapor pressure versus high vacuum deposition

被引:58
作者
Dubrovskii, V. G.
Sibirev, N. V.
Suris, R. A.
Cirlin, G. E.
Harmand, J. C.
Ustinov, V. M.
机构
[1] Russian Acad Sci, AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia
[2] Russian Acad Sci Res & Educ, St Petersburg Phys Tech Ctr, St Petersburg 195220, Russia
[3] Russian Acad Sci, Inst Analyt Instrumentat, St Petersburg 190103, Russia
基金
俄罗斯基础研究基金会;
关键词
nanowires; kinetic growth model;
D O I
10.1016/j.susc.2007.04.122
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Theoretical model of nanowire formation is presented, that accounts for the adatom diffusion from the sidewalls and from the substrate surface to the wire top. Exact solution for the adatom diffusion flux from the surface to the wires is analyzed in different growth regimes. It is shown theoretically that, within the range of growth conditions, the growth rate depends on wire radius R approximately as 1/R-2, which is principally different from the conventional 1/R performance. The effect is verified experimentally for the MBE grown GaAs and AlGaAs wires. The dependences of wire length on the drop density, surface temperature and deposition flux during vapor pressure deposition and high vacuum deposition are analyzed and the differences between these two growth techniques are discussed. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:4395 / 4401
页数:7
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