A flexible pH sensor based on the iridium oxide sensing film

被引:305
作者
Huang, Wen-Ding [1 ]
Cao, Hung [1 ]
Deb, Sanchali [1 ]
Chiao, Mu [2 ]
Chiao, J. C. [1 ]
机构
[1] Univ Texas Arlington, Dept Elect Engn, Arlington, TX 76019 USA
[2] Univ British Columbia, Dept Mech Engn, Vancouver, BC V6T 1Z4, Canada
关键词
Iridium oxide; Miniature pH sensor array; Polyimide flexible substrate; Sol-gel process; Deformable sensors; ELECTRODES; HYSTERESIS; RUTHENIUM; BEHAVIOR; CHLORIDE; CHARGE; DRIFT;
D O I
10.1016/j.sna.2011.05.016
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have developed a novel flexible pH sensor based on a polymeric substrate by low-cost sol-gel fabrication process of iridium oxide (IrOx) sensing film. A pair of miniature IrOx/AgCl electrodes on a flexible substrate generated electrical potentials in solutions by electrochemical mechanisms responding to their pH levels. Our flexible IrOx pH sensors exhibited promising sensing performance with a near-Nernstian response insensitivity repeatedly and reversibly between -51.1 mV/pH and -51.7 mV/pH in the pH range between 1.5 and 12 at 25 degrees C. The fabrication processes including sol-gel deposition, thermal oxidation, and AgCl electro-plating on polymeric substrates were reported. The performance and characterization of the flexible pH sensors in sensitivity, response time, stability, reversibility, repeatability and selectivity were also discussed. Our IrOx pH electrodes on a deformable substrate demonstrated their sensing capability while they were conformed to a curved surface inside a limited space with distinct responding potentials at various pH levels similar to the traditional glass-rod pH electrodes. Published by Elsevier B.V.
引用
收藏
页码:1 / 11
页数:11
相关论文
共 49 条
[1]   Hydrous Ir oxide film properties at sol-gel derived Ir nanoparticles [J].
Andreas, H ;
Elzanowska, H ;
Serebrennikova, I ;
Birss, V .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (12) :4598-4604
[2]   PROPERTIES OF THERMALLY PREPARED IRIDIUM DIOXIDE ELECTRODES [J].
ARDIZZONE, S ;
CARUGATI, A ;
TRASATTI, S .
JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1981, 126 (1-3) :287-292
[3]  
Ativanichayaphong T., 2008, DIGESTIVE DIS WEEK 2
[4]   Hysteresis errors of commonly used sensor materials [J].
Aydemir, Bulent ;
Yagmur, Levent ;
Fank, Sinan .
MEASUREMENT, 2010, 43 (06) :792-796
[5]   Selectivity of liquid membrane ion-selective electrodes [J].
Bakker, E .
ELECTROANALYSIS, 1997, 9 (01) :7-12
[6]  
Bard A.J., 2006, ELECTROCHEMICAL METH
[7]   PH sensors with lithium lanthanum titanate sensitive material: applications in food industry [J].
Bohnke, C ;
Duroy, H ;
Fourquet, JL .
SENSORS AND ACTUATORS B-CHEMICAL, 2003, 89 (03) :240-247
[8]   RECOMMENDATIONS FOR NOMENCLATURE OF ION-SELECTIVE ELECTRODES - (IUPAC RECOMMENDATIONS 1994) [J].
BUCK, RP ;
LINDNER, E .
PURE AND APPLIED CHEMISTRY, 1994, 66 (12) :2527-2536
[9]  
BURKE LD, 1981, J ELECTROANAL CHEM, V122, P403, DOI 10.1016/0368-1874(81)87377-7
[10]   Study on the temperature effect, hysteresis and drift of pH-ISFET devices based on amorphous tungsten oxide [J].
Chiang, JL ;
Jan, SS ;
Chou, JC ;
Chen, YC .
SENSORS AND ACTUATORS B-CHEMICAL, 2001, 76 (1-3) :624-628