共 8 条
[1]
CELBAR A, 1992, 28 S DEV MAT SD 92 3, P269
[4]
Hofmann D., 1992, P 35 TECHN C SVC P, P218
[5]
*ISO, 77241231984 ISO
[6]
Milosev I, 1996, SURF INTERFACE ANAL, V24, P448, DOI 10.1002/(SICI)1096-9918(199607)24:7<448::AID-SIA137>3.0.CO
[7]
2-F
[8]
INFLUENCE OF APPARATUS GEOMETRY AND DEPOSITION CONDITIONS ON STRUCTURE AND TOPOGRAPHY OF THICK SPUTTERED COATINGS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1974, 11 (04)
:666-670

