Point-spread function for binary diffractive lenses fabricated with misaligned masks

被引：15

作者：

Unno, Y ^{[1
]}

机构：

[1] Canon Inc, Nanotechnol Res Ctr, Utsunomiya, Tochigi 32132, Japan

来源：

APPLIED OPTICS | 1998年 / 37卷 / 16期

关键词：

D O I：

10.1364/AO.37.003401

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The influence of mask-alignment errors on the fabrication of four-level binary lenses has been investigated. The pupil function was derived as a function of the amount of misalignment between the two mask patterns based on scalar diffraction theory. It was found that the phase term in the pupil function affects only the location of the point-spread function, whereas the uneven light transmittance degrades the image quality in the direction of the misalignment. The Strehl intensity was found to decrease almost linearly with respect to the amount of error. (C) 1998 Optical Society of America.

引用

页码：3401 / 3407

页数：7

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