X-ray photoelectron spectroscopy study of the first stages of ZnO growth and nanostructure dependence of the effects of polarization at ZnO/SiO2 and ZnO/Al2O3 interfaces

被引:23
作者
Martin-Concepción, AI
Yubero, F
Espinós, JP
González-Elipe, AR
Tougaard, S
机构
[1] CSIC, USE, Inst Ciencia Mat Sevilla, E-41092 Seville, Spain
[2] Univ So Denmark, Dept Phys, DK-5230 Odense M, Denmark
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2003年 / 21卷 / 04期
关键词
D O I
10.1116/1.1564033
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A critical characteristic of nanoparticles and, in general, of nanomaterials, is the overweighing importance of the surface and interface layers relative to the bulk because of the small size of the aggregates (in three dimensions) or thickness of the layers (in the case of two dimensions) that constitute the nanomaterial. This article reports the characterization of interface layers of ZnO/MOx (MOx: Al2O3 and SiO2) using x-ray photoelectron spectroscopy (XPS). Careful experiments consisting of the deposition of ZnO material on SiO2 and Al2O3 substrates have been performed. Several samples were produced and characterized in situ. The nanostructure of the first stages of growth of the ZnO deposited was determined by Tougaard peak-shape analysis of several photoelectron peaks in both the substrate and overlayer and the growth mechanisms determined were found to be consistent. Thus, the actual nanostructure of the growing ZnO films was carefully determined. In addition, the chemical interaction at the ZnO/MOx interface was monitored by following the variation of the Auger parameter of the Zn atoms as the amount of ZnO deposited was increased. Thus, changes of the Auger parameter of the Zn atoms were correlated with the actual nanostructures formed by the ZnO deposits. From this information,. a model is presented that accounts for changes in the electronic parameters determined by XPS as a result of bonding and polarization interaction at the interface. (C) 2003 American Vacuum Society.
引用
收藏
页码:1393 / 1398
页数:6
相关论文
共 18 条
[1]  
BRIGGS D, 1990, PRACTICAL SURFACE AN, V1
[2]   Synchrotron photoemission characterization of TiO2 supported on SiO2 [J].
Espinos, JP ;
Lassaletta, G ;
Caballero, A ;
Fernandez, A ;
Gonzalez-Elipe, AR ;
Stampfl, A ;
Morant, C ;
Sanz, JM .
LANGMUIR, 1998, 14 (17) :4908-4914
[3]   Photoemission spectroscopy analysis of ZnO:Ga films for display applications [J].
Forsythe, EW ;
Gao, YL ;
Provost, LG ;
Tompa, GS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (04) :1761-1764
[4]   ZnO thin films prepared by remote plasma-enhanced CVD method [J].
Haga, K ;
Kamidaira, M ;
Kashiwaba, Y ;
Sekiguchi, T ;
Watanabe, H .
JOURNAL OF CRYSTAL GROWTH, 2000, 214 :77-80
[5]   Optimization of transparent conductive oxide for improved resistance to reactive and/or high temperature optoelectronic device processing [J].
Komaru, T ;
Shimizu, S ;
Kanbe, H ;
Maeda, Y ;
Kamiya, T ;
Fortmann, CM ;
Shimizu, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (10) :5796-5804
[6]   Preparation of transparent and conductive Al-doped ZnO thin films by ECR plasma enhanced CVD [J].
Martín, A ;
Espinós, JP ;
Justo, A ;
Holgado, JP ;
Yubero, F ;
González-Elipe, AR .
SURFACE & COATINGS TECHNOLOGY, 2002, 151 :289-293
[7]   Interpretation of the binding energy and auger parameter shifts found by XPS for TiO2 supported on different surfaces [J].
Mejias, JA ;
Jimenez, VM ;
Lassaletta, G ;
Fernandez, A ;
Espinos, JP ;
GonzalezElipe, AR .
JOURNAL OF PHYSICAL CHEMISTRY, 1996, 100 (40) :16255-16262
[8]   Auger parameter and Wagner plot in the characterization of chemical states by X-ray photoelectron spectroscopy: a review [J].
Moretti, G .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1998, 95 (2-3) :95-144
[9]   THE AUGER PARAMETER AND THE POLARIZATION ENERGY - A SIMPLE ELECTROSTATIC MODEL [J].
MORETTI, G .
SURFACE AND INTERFACE ANALYSIS, 1990, 16 (1-12) :159-162
[10]  
TANUMA S, 1993, SURF INTERFACE ANAL, V21, P165