Diamond replicas from microstructured silicon masters

被引：31

作者：

Björkman, H ^{[1
]}

Rangsten, P ^{[1
]}

Hollman, P ^{[1
]}

Hjort, K ^{[1
]}

机构：

[1] Uppsala Univ, Dept Mat Sci, SE-75121 Uppsala, Sweden

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 73卷 / 1-2期

关键词：

diamond; CVD; microstructure; replica;

D O I：

10.1016/S0924-4247(98)00250-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We are developing a microstructure technology for thick film diamond replicas, using deposition by hot filament chemical vapour deposition (CVD) on microstructured silicon. This technology is primarily intended to make micromechanical structures for microstructured carriers, fluidic cooling systems, systems for biochemical analyses and processes, and moulds for thermoplastic and metal microstructures. With thick film deposition ridges, trenches, and capillary channels with high resolution coverage and low roughness, rms < 2 nm, were created. Demonstrator structures for microfluidic, microstructured carriers, and polymer moulding applications are presented. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：24 / 29

页数：6

共 17 条

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