X-ray imaging microscopy at 25 keV with Fresnel zone plate optics

被引：23

作者：

Awaji, M

Suzuki, Y

Takeuchi, A

Takano, H

Kamijo, N

Tamura, S

Yasumoto, M

机构：

[1] Japan Synchrotron Radiat Res Inst, JASRI, SPring8, Mikazuki, Hyogo 6795198, Japan

[2] Kansai Med Univ, Osaka 5731136, Japan

[3] Osaka Natl Res Inst, Osaka 5638577, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2001年 / 467卷

关键词：

imaging hard X-ray microscopy; sputtered-sliced Fresnel zone plate; undulator radiation; incoherent illumination; diffuser; speckle noise;

D O I：

10.1016/S0168-9002(01)00489-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

X-ray imaging microscopy with a sputtered-sliced Fresnel zone plate (SS-FZP) has been developed at an X-ray energy of 25keV. Objects were imaged in transmission with the SS-FZP as an objective with a magnification of 10.2 times, and detected with a X-ray image sensor. The performance of the imaging microscope has been tested with a gold mesh and a resolution test pattern at an undulator beamline 47XU of SPring-8. The resolution test patterns up to 0.5 mum line-and-space structures have been resolved. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：845 / 848

页数：4