Opto-tactile sensor for 2D and 3D measurement of small structures on coordinate measuring machines

被引：75

作者：

Schwenke, H ^{[1
]}

Wäldele, F ^{[1
]}

Weiskirch, C ^{[1
]}

Kunzmann, H ^{[1
]}

机构：

[1] Phys Tech Bundesanstalt, D-3300 Braunschweig, Germany

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2001年 / 50卷 / 01期

关键词：

coordinate measuring machine (CMM); probe; micro-parts;

D O I：

10.1016/S0007-8506(07)62140-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel tactile probing system for dimensional measurement of small structures is presented. The measurement principle combines optical and mechanical techniques and allows probing elements below 50 mum to be realized. The measurement uncertainties achievable are in the sub-micron order. With this full 3D sensitivity on the basis of the opto-tactile concept is achieved. Some exemplary measurements show the capability of the new sensor.

引用

页码：361 / 364

页数：4

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