Enhanced performance of silicon based photodetectors using silicon/germanium nanostructures

被引:29
作者
Konle, J [1 ]
Presting, H
Kibbel, H
Thonke, K
Sauer, R
机构
[1] Univ Ulm, Dept Semicond Phys, D-89069 Ulm, Germany
[2] DaimlerChrysler Res Ctr, D-89081 Ulm, Germany
关键词
SiGe; IR-detectors; solar cells; quantum dots; Stranski Krastanow growth;
D O I
10.1016/S0038-1101(01)00234-9
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have studied the influence of nanoscaled lateral silicon/silicon-germanium layers and three-dimensional germanium quantum dots on the performance of silicon based infrared detectors in the wavelength range between 2 and 10 tm and solar cells for space applications. The SiGe heterostructures were grown by molecular-beam epitaxy (MBE) on (100)-Si substrates allowing it to tailor the photoresponse and cut-off wavelength for IR-detectors by "band engineering" of the Ge-content and geometry of the active layers. A detectivity in excess of 8 x 10(11) cmHz(0.5)/W at 75 K was measured for Si/SiGe quantum well structures. In addition, the growth of Ge islands on Si layers in the Stranski-Krastanow mode was performed to increase absorption and quantum efficiency in Si-solar cells. Atomic force microscopy and photoluminescence measurements of Ge-island structures, grown by MBE under varying conditions, exhibit three-dimensional growth in a small temperature regime between 500 degreesC and 700 degreesC. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:1921 / 1925
页数:5
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