A micromachine-based RF low-noise voltage-controlled oscillator

被引:36
作者
Young, DJ
Boser, BE
机构
来源
PROCEEDINGS OF THE IEEE 1997 CUSTOM INTEGRATED CIRCUITS CONFERENCE | 1997年
关键词
D O I
10.1109/CICC.1997.606660
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A voltage-controlled oscillator (VCO) employs an aluminum micromachined variable capacitor for frequency tuning. Unlike conventional varactor diodes, the capacitor is fabricated on a silicon substrate and thus amenable to monolithic integration with a standard IC process. Experimental capacitors achieve a 16% tuning range with a nominal capacitance value of 2pF and a quality factor above 60 at 1GHz. A prototype VCO exhibits -107dBc/Hz phase-noise at 100kHz offset frequency from the carrier. The center frequency of 714MHz and 14MHz tuning range are limited by the test setup.
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收藏
页码:431 / 434
页数:4
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