Fabrication of hybrid sol-gel glass diffractive elements

被引：1

作者：

Rantala, JT ^{[1
]}

Äyräs, P ^{[1
]}

Levy, R ^{[1
]}

Descour, MR ^{[1
]}

Honkanen, S ^{[1
]}

Peyghambarian, N ^{[1
]}

机构：

[1] VTT Elect, FIN-90570 Oulu, Finland

来源：

INTEGRATED OPTICS DEVICES III | 1999年 / 3620卷

关键词：

hybrid sol-gel; diffractive elements; UV-lithography processing; and diffractive lens arrays;

D O I：

10.1117/12.343732

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrates that also have a significant role in the component assembly. The synthesised material has a negative tone property under UV-radiation and they can be patterned by a conventional W-lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.

引用

页码：212 / 218

页数：7

共 18 条

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