Dielectric function representation by B-splines

被引：233

作者：

Johs, Blaine ^{[1
]}

Hale, Jeffrey S. ^{[1
]}

机构：

[1] JA Woollam Co Inc, Lincoln, NE 68508 USA

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2008年 / 205卷 / 04期

关键词：

D O I：

10.1002/pssa.200777754

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Accurate dielectric function values are essential for spectroscopic ellipsometry data analysis by traditional optical model-based analysis techniques. In this paper, we show that B-spline basis functions offer many advantages for parameterizing dielectric functions. A Kramers-Kronig consistent B-spline formulation, based on the standard B-spline recursion relation, is derived. B-spline representations of typical semiconductor and metal dielectric functions are also presented. [GRAPHICS] Kramers-Kromg consistent B-spline basis functions. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：715 / 719

页数：5

共 8 条

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Farin G., 1998, CURVES SURFACES CAGD

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