Effects of chemical etching with nitric acid on glass surfaces

被引:17
作者
Jang, HK [1 ]
Chung, YD
Whangbo, SW
Kim, TG
Whang, CN
Lee, SJ
Lee, S
机构
[1] Yonsei Univ, Atom Scale Surface Sci Res Ctr, Seoul 120749, South Korea
[2] Yonsei Univ, Dept Phys, Seoul 120749, South Korea
[3] Adv Lab Solut, Dept Res & Dev, Seoul 120140, South Korea
[4] Korea Inst Sci & Technol, Photon Res Ctr, Seoul 130650, South Korea
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 2001年 / 19卷 / 01期
关键词
D O I
10.1116/1.1333087
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Glass slides were chemically etched with nitric acid using five different methods. We investigated the effects of chemical etching treatments on such properties as chemical composition, surface roughness, transmittance, and thermal stability of the glass. Sodium, calcium, and aluminum atoms in the surface of the glass are effectively reduced by chemical etching with nitric acid. Especially, boiling the glass in a 70% nitric acid solution for 30 min is more effective in the reduction of sodium, calcium, and aluminum atoms at the surface of the glass than other etching methods with nitric acid. The surface morphologies of the glasses were very similar regardless of the chemical etching treatments with nitric acid etchant. Root-mean-square surface roughness of the bare glass was 0.58 nm but that of the glass etched with nitric acid was ranged from 5.4 to 6.8 nm. Sodium concentration at the glass surface was largely reduced from 2.44% to 0.25%. In order to investigate the thermal stability of the glass, the bare glass and the glass samples boiled for 30 min in a 70% HNO3 solution were annealed in air at 300, 400, 500, and 600 degreesC for 1 h. Sodium, aluminum, and calcium at the surface of the glass increased with an annealing temperature regardless of chemical etching with nitric acid, but the Na, Al, and Ca content at the surface of the glass boiled in 70% HNO3 for 30 min was greatly reduced relative to that of the surface of the bare glass at an annealing temperature of 500 degreesC. (C) 2001 American Vacuum Society.
引用
收藏
页码:267 / 274
页数:8
相关论文
共 14 条
[1]  
BACH H, 1967, THIN SOLID FILMS, V1, P255
[2]  
BLECH I, 1970, THIN FILMS INTEGRATE, P22
[3]  
BUDD SM, 1962, ADV GLASS TECHNOLOGY, V1, P527
[4]  
COUSEN A, 1936, J SOC GLASS TECHNOL, V20, P418
[6]  
Elshabini-Riad A, 1997, THIN FILM TECHNOLOGY, P6
[7]   ZUR HYDROTHERMALEN SYNTHESE VON BROOKIT [J].
KEESMANN, I .
ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1966, 346 (1-2) :30-&
[8]   STRENGTHENING OF GLASS SURFACES BY SULFUR TRIOXIDE TREATMENT [J].
MOCHEL, EL ;
NORDBERG, ME ;
ELMER, TH .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1966, 49 (11) :585-&
[9]  
Moulder J.F., 1995, HDB XRAY PHOTOELECTR
[10]   Photo-oxidatively self-cleaning transparent titanium dioxide films on soda lime glass: The deleterious effect of sodium contamination and its prevention [J].
Paz, Y ;
Heller, A .
JOURNAL OF MATERIALS RESEARCH, 1997, 12 (10) :2759-2766