Analysis of CO and CH4 gas mixtures by using a micromachined sensor array

被引:47
作者
Capone, S
Siciliano, P
Bârsan, N
Weimar, U
Vasanelli, L
机构
[1] Univ Lecce, Dipartimento Ingn Innovaz, I-73100 Lecce, Italy
[2] CNR, IME, Ist Studio Nuovi Mat Elettr, I-73100 Lecce, Italy
[3] Univ Tubingen, Inst Phys & Theoret Chem, D-72076 Tubingen, Germany
关键词
gas sensors array; micro-hotplates; pattern recognition; multicomponent analysis;
D O I
10.1016/S0925-4005(01)00789-4
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
An array of highly sensitive and mechanically stable gas sensors based on different sol-gel fabricated Pd-doped SnO2 nanocrystalline thick films has been developed for the analysis of ternary mixtures in the concentration ranges of 0-100 ppm CO, 0-4000 ppm CH4 and 0-50% relative humidity. The selectivity of the sensors has been modulated by varying the percentage of Pd content and the contacts geometry, while the use of micromachined hotplates as substrates for the sensors allowed a reduction of heater power consumption and a fast and accurate temperature control. Principal component analysis (PCA) as pattern recognition and principal component regression (PCR) as multicomponent analysis method have been used to analyze these mixtures qualitatively and quantitatively obtaining good results. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:40 / 48
页数:9
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