Continuous tape coating by thermal evaporation

被引:7
作者
Nemetschek, R [1 ]
Prusseit, W
Holzapfel, B
Eickemeyer, J
Miller, U
Maher, E
机构
[1] THEVA Dunnschichttech GmbH, Ismaning, Germany
[2] IFW, D-00171 Dresden, Germany
[3] Plansee GmbH, Plansee, Germany
[4] Oxford Instruments Superconduct Ltd, Eynsham OX29 4TL, Oxon, England
关键词
coated conductors; rolling-assisted biaxially textured substrate (RABiTS); superconductor films; YBaCuO; -; films;
D O I
10.1109/TASC.2003.811825
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Among the various coating techniques, thermal evaporation currently allows the highest YBCO volume deposition rates because of its large area capability. This "simultaneous, large area deposition" capability translates into long tape lengths when the deposition area is densely filled up with metal tape. On short rolling-assisted biaxially textured substrate samples thermal evaporation has already established critical current densities in excess of 1 MA/cm(2) at 77 K, with very promising performance in magnetic fields. Recently, the deposition technique has been scaled up using a multiturn tape winder giving a simultaneously coatable length of about 4 m of 1-cm-wide tape. The reel-to-reel tape deposition system is designed for long term continuous operation based on in-situ refillable evaporation sources and controlled using feedback from atomic absorption spectroscopy measurements in the vapor phase. Here, the authors present results on the first coated conductor tape continuously fabricated by this technique.
引用
收藏
页码:2477 / 2480
页数:4
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