Study of microfluidic components:: Application to a volumetric micropump

This paper is focused on experimental, numerical and analytical study of microfluidic devices. These devices are obtained by DRIE. Technique on a silicon wafer. We focused the study on microdiodes such as nozzle diffuser and Tiesla diode. The microdiodes are then used in an electrostatic micropump. The first part describes the process and characterisation principle of the devices. All parameters of the structures are also described in order to obtain an optimum efficiency. In the second part, all the results are applied on the modelisation of the micropump. A simulator has been developed under Matlab with an hybrid description using both classical flow laws and electrical analogy.