Metallic nanoparticles formed in polyimide by ion implantation

被引：29

作者：

Kobayaski, T ^{[1
]}

Iwata, T ^{[1
]}

Doi, Y ^{[1
]}

Iwaki, M ^{[1
]}

机构：

[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2001年 / 175卷

关键词：

polyimide; high-dose implantation; metallic nanoparticles; carbonization;

D O I：

10.1016/S0168-583X(01)00342-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Changes in the composition and structure of polyimide films due to high-dose metallic ion implantation and irradiation-induced carbonization have been studied by surface characterization techniques and electron microscopy. The polyimide film specimens were irradiated with metallic ions with fluences from 1 x 10(15) to 5 x 10(17) cm(-2). After irradiation with Ag, Cu and Pd ions with a fluence of 1.0 x 10(16) cm(-2) ,nano-sized implanted metallic particles were observed using cross-sectional transmission electron microscopy. The electron diffraction patterns suggest that these particles have a crystalline structure. On the other hand, no particles were observed in specimens implanted with Fe, W and K ions. Rutherford backscattering spectroscopy (RBS) suggests that an interaction between carbon and the implanted atoms affects the formation of particles. The depth profiles of hydrogen atoms were investigated using elastic recoil detection analysis (ERDA). (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：548 / 553

页数：6

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