A new robust on-wafer 1/f noise measurement and characterization system

被引：32

作者：

Blaum, A ^{[1
]}

Pilloud, O ^{[1
]}

Scalea, G ^{[1
]}

Victory, J ^{[1
]}

Sischka, T ^{[1
]}

机构：

[1] Motorola Inc, CH-1218 Geneva, Switzerland

来源：

ICMTS 2001: PROCEEDINGS OF THE 2001 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES | 2001年

关键词：

D O I：

10.1109/ICMTS.2001.928650

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Performing accurate, robust and repeatable 1/f measurement is critical to meaningful modeling and simulation of 1/f noise. Accurate measurement and modeling of 1/f noise of such devices as deep submicron CMOS, HBTs, and RF passive components is critical to design of RF circuits. In this paper, a new [1] on-wafer flicker noise characterization system including test structure methodology is presented. The system, well suited for technology characterization, has been developed at Motorola in collaboration with Agilent Technologies.

引用

页码：125 / 130

页数：6