Hierarchical self-assembly of block copolymers for lithography-free nanopatterning

被引：70

作者：

Kim, Bong Hoon ^{[1
]}

Shin, Dong Ok ^{[1
]}

Jeong, Seong-Jun ^{[1
]}

Koo, Chong Min ^{[2
]}

Jeon, Sang Chul ^{[3
]}

Hwang, Wook Jung ^{[3
]}

Lee, Sumi ^{[4
]}

Lee, Moon Gyu ^{[4
]}

Kim, Sang Ouk ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Inst Nanocentury, Taejon 305701, South Korea

[2] Korea Inst Sci & Technol, Hybrid Mat Res Ctr, Seoul, South Korea

[3] Natl Nanofab Ctr NNFC, Taejon 305701, South Korea

[4] Samsung Adv Inst Technol, Yongin 446712, Gyunggi Do, South Korea

来源：

ADVANCED MATERIALS | 2008年 / 20卷 / 12期

关键词：

D O I：

10.1002/adma.200702285

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Hierarchical self-assembly of block copolymers has been achieved by two steps of sequential ordering processes, consisting of self-organized micropatterning from a dewetting block polymer solution and thermal annealing. The self-organized micropattern induces the spontaneous alignment of self-assembled lamellae (see figure), which is successfully applied for a lithography-free, ultra-large-scale nanopatterning.

引用

页码：2303 / +

页数：6

共 32 条

[1] Enhanced order of block copolymer cylinders in single-layer films using a sweeping solidification front
Angelescu, Dan E.
Waller, Judith H.
Adamson, Douglas H.
Register, Richard A.
Chaikin, Paul M.
[J]. ADVANCED MATERIALS, 2007, 19 (18) : 2687 - +
[2] Macroscopic orientation of block copolymer cylinders in single-layer films by shearing
Angelescu, DE
Waller, JH
Adamson, DH
Deshpande, P
Chou, SY
Register, RA
Chaikin, PM
[J]. ADVANCED MATERIALS, 2004, 16 (19) : 1736 - +
[3] Chandrasekhar S., 1992, Liquid Crystals, V2nd ed.
[4] Nanostructure engineering by templated self-assembly of block copolymers
Cheng, JY
Mayes, AM
Ross, CA
[J]. NATURE MATERIALS, 2004, 3 (11) : 823 - 828
[5] Microdomain patterns from directional eutectic solidification and epitaxy
De Rosa, C
Park, C
Thomas, EL
Lotz, B
[J]. NATURE, 2000, 405 (6785) : 433 - 437
[6] Contact line deposits in an evaporating drop
Deegan, RD
Bakajin, O
Dupont, TF
Huber, G
Nagel, SR
Witten, TA
[J]. PHYSICAL REVIEW E, 2000, 62 (01): : 756 - 765
[7] Hydrogen sensors and switches from electrodeposited palladium mesowire arrays
Favier, F
Walter, EC
Zach, MP
Benter, T
Penner, RM
[J]. SCIENCE, 2001, 293 (5538) : 2227 - 2231
[8] Liquid crystalline peptide nanowires
Han, Tae Hee
Kim, Jangbae
Park, Ji Sun
Park, Chan Beum
Ihee, Hyotcherl
Kim, Sang Ouk
[J]. ADVANCED MATERIALS, 2007, 19 (22) : 3924 - +
[9] Mechanisms of ordering in striped patterns
Harrison, C
Adamson, DH
Cheng, ZD
Sebastian, JM
Sethuraman, S
Huse, DA
Register, RA
Chaikin, PM
[J]. SCIENCE, 2000, 290 (5496) : 1558 - 1560
[10] Functional materials based on self-assembly of polymeric supramolecules
Ikkala, O
ten Brinke, G
[J]. SCIENCE, 2002, 295 (5564) : 2407 - 2409

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