PZT and PT screen-printed thick films

被引:30
作者
Simon, L [1 ]
Le Dren, S [1 ]
Gonnard, P [1 ]
机构
[1] Inst Natl Sci Appl, Lab Genie Elect & Ferroelect, F-69621 Villeurbanne, France
关键词
films; grain size; piezoelectric properties; PT; PZT;
D O I
10.1016/S0955-2219(01)00037-1
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Thick films (40-80 mum) of modified lead zirconate titanate (PZT) and lead titanate (PT) are screen-printed on alumina substrates electroded with Ag-Pd. First the influence of the powder grain size distribution on film characteristics after sintering is studied. With regard to the powder preparation, two processes are used: a mixed-oxide method and a wet coprecipitation process. Then thick films characteristics are compared with bulk ceramics ones. Two main factors explain the observed differences: residual porosity of the film and lateral clamping effect of the substrate. Other piezoelectric and elastic films coefficients are estimated from a plane wave model. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:1441 / 1444
页数:4
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