Self-assembled switches based on electroactuated multiwalled nanotubes -: art. no. 193107

被引:83
作者
Dujardin, E [1 ]
Derycke, V [1 ]
Goffman, MF [1 ]
Lefèvre, R [1 ]
Bourgoin, JP [1 ]
机构
[1] CEA Saclay, Lab Elect Mol, CEA DSM, SPEC, F-91191 Gif Sur Yvette, France
关键词
D O I
10.1063/1.2126805
中图分类号
O59 [应用物理学];
学科分类号
摘要
A fabrication process for nanoelectromechanical systems (NEMS) based on multiwalled carbon nanotubes (CNTs) suspended across metallic trenches is described. The process is versatile and allows the production of CNT-NEMS with singly or doubly clamped nanotubes at an adjustable height above a bottom electrode. When a voltage bias is applied between the nanotube and the bottom electrode, the devices act as very efficient electrical switches. Surface functionalization of the bottom electrode with a self-assembled monolayer is implemented to improve the switching reversibility. Moreover, it opens opportunities to use these CNT-NEMS as a vertical cross-bar junction for molecular electronics studies. (C) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
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