Oriented mesoporous organosilicate thin films

被引：135

作者：

Freer, EM ^{[1
]}

Krupp, LE ^{[1
]}

Hinsberg, WD ^{[1
]}

Rice, PM ^{[1
]}

Hedrick, JL ^{[1
]}

Cha, JN ^{[1
]}

Miller, RD ^{[1
]}

Kim, HC ^{[1
]}

机构：

[1] IBM Corp, Almaden Res Ctr, Div Res, San Jose, CA 95120 USA

来源：

NANO LETTERS | 2005年 / 5卷 / 10期

关键词：

D O I：

10.1021/nl051517h

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Coassemblies of block copolymers and inorganic precursors offer a path to ordered inorganic nanostructures. In thin films, these materials combined with domain alignment provide highly robust nanoscopic templates. We report a simple path to control the morphology, scaling, and orientation of ordered mesopores in organosilicate thin films through the coassembly of a diblock copolymer, poly(styrene-b-ethylene oxide) (PS-b-PEO), and an oligomeric organosilicate precursor that is selectively miscible with PEO. Continuous films containing cylindrical or spherical pores are generated by varying the mixing composition of symmetric PS-b-PEO and an organosilicate precursor. Tuning interfacial energy at both air/film and film/substrate interfaces allows the control of cylindrical pore orientation normal to the supported film surfaces. Our method provides well-ordered mesoporous structures within organosilicate thin films that find broad applications as highly stable nanotemplates.

引用

页码：2014 / 2018

页数：5

共 21 条

[1] Block copolymers - Designer soft materials [J].

Bates, FS ;

Fredrickson, GH .

PHYSICS TODAY, 1999, 52 (02) :32-38

[2] Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication [J].

Black, CT ;

Guarini, KW ;

Milkove, KR ;

Baker, SM ;

Russell, TP ;

Tuominen, MT .

APPLIED PHYSICS LETTERS, 2001, 79 (03) :409-411

[3] Templating of silsesquioxane cross-linking using unimolecular self-organizing polymers [J].

Connor, EF ;

Sundberg, LK ;

Kim, HC ;

Cornelissen, JJ ;

Magbitang, T ;

Rice, PM ;

Lee, VY ;

Hawker, CJ ;

Volksen, W ;

Hedrick, JL ;

Miller, RD .

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2003, 42 (32) :3785-3788

[4]

GUARINI KW, 2003, IEEE INT EL DEV M 22

[5] BLOCK COPOLYMER THEORY .4. NARROW INTERPHASE APPROXIMATION [J].

HELFAND, E ;

WASSERMAN, ZR .

MACROMOLECULES, 1976, 9 (06) :879-888

[6]

HUE Q, 1995, SCIENCE, V268, P1324

[7] ORDERED MESOPOROUS MOLECULAR-SIEVES SYNTHESIZED BY A LIQUID-CRYSTAL TEMPLATE MECHANISM [J].

KRESGE, CT ;

LEONOWICZ, ME ;

ROTH, WJ ;

VARTULI, JC ;

BECK, JS .

NATURE, 1992, 359 (6397) :710-712

[8]

KRUPP LE, 2005, IN PRESS MICROSC MIC

[9]

Lin ZQ, 2002, ADV MATER, V14, P1373, DOI 10.1002/1521-4095(20021002)14:19<1373::AID-ADMA1373>3.0.CO

[10]

2-F

← 1 2 3 →