Predicted properties of microhollow cathode discharges in xenon

被引:129
作者
Boeuf, JP [1 ]
Pitchford, LC
Schoenbach, KH
机构
[1] CNRS, UMR 5002, CPAT, F-31062 Toulouse, France
[2] Old Dominion Univ, Ctr Bioelect, Norfolk, VA 23529 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.1862781
中图分类号
O59 [应用物理学];
学科分类号
摘要
A fluid model has been developed and used to help clarify the physical mechanisms occurring in microhollow cathode discharges (MHCD). Calculated current-voltage (I-V) characteristics and gas temperatures in xenon at 100 Torr are presented. Consistent with previous experimental results in similar conditions, we find a voltage maximum in the I-V characteristic. We show that this structure reflects a transition between a low-current, abnormal discharge localized inside the cylindrical hollow cathode to a higher-current, normal glow discharge sustained by electron emission from the outer surface of the cathode. This transition, due to the geometry of the device, is a factor contributing to the well-known stability of MHCDs. (C) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
相关论文
共 13 条
[1]   2-DIMENSIONAL MODEL OF A CAPACITIVELY COUPLED RF DISCHARGE AND COMPARISONS WITH EXPERIMENTS IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCE REACTOR [J].
BOEUF, JP ;
PITCHFORD, LC .
PHYSICAL REVIEW E, 1995, 51 (02) :1376-1390
[2]  
CALLEGARI T, IN PRESS IEEE T PLAS
[3]  
FIALA A, 1995, P 22 INT C PHEN ION, P191
[4]   Generation of large-volume, atmospheric-pressure, nonequilibrium plasmas [J].
Kunhardt, EE .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2000, 28 (01) :189-200
[5]   Excimer emission from microhollow cathode argon discharges [J].
Moselhy, M ;
Petzenhauser, I ;
Frank, K ;
Schoenbach, KH .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2003, 36 (23) :2922-2927
[6]  
MOSELHY MM, COMMUNICATION
[7]   Characterization of a high-pressure microdischarge using diode laser atomic absorption spectroscopy [J].
Penache, C ;
Miclea, M ;
Bräuning-Demian, A ;
Hohn, O ;
Schössler, S ;
Jahnke, T ;
Niemax, K ;
Schmidt-Böcking, H .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2002, 11 (04) :476-483
[8]   Calculated characteristics of radio-frequency plasma display panel cells including the influence of xenon metastables [J].
Pitchford, LC ;
Kang, J ;
Punset, C ;
Boeuf, JP .
JOURNAL OF APPLIED PHYSICS, 2002, 92 (12) :6990-6997
[9]   Calculated gas temperature profiles in argon glow discharges [J].
Revel, I ;
Pitchford, LC ;
Boeuf, JP .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (05) :2234-2239
[10]   Microhollow cathode discharges [J].
Schoenbach, KH ;
Moselhy, M ;
Shi, W ;
Bentley, R .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (04) :1260-1265