共 13 条
[1]
2-DIMENSIONAL MODEL OF A CAPACITIVELY COUPLED RF DISCHARGE AND COMPARISONS WITH EXPERIMENTS IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCE REACTOR
[J].
PHYSICAL REVIEW E,
1995, 51 (02)
:1376-1390
[2]
CALLEGARI T, IN PRESS IEEE T PLAS
[3]
FIALA A, 1995, P 22 INT C PHEN ION, P191
[6]
MOSELHY MM, COMMUNICATION
[10]
Microhollow cathode discharges
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2003, 21 (04)
:1260-1265