Track-etch templates designed for micro- and nanofabrication

被引:107
作者
Ferain, E [1 ]
Legras, R [1 ]
机构
[1] Univ Catholique Louvain, Unite Phys & Chim Hauts Polymeres, B-1348 Louvain, Belgium
关键词
latent track; pore etching; template; nanomaterial; polycarbonate; polyimide;
D O I
10.1016/S0168-583X(03)00637-2
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This paper reports on the advances made in the laboratory in the development of porous media by track-etching process, and on their use by research partners as templates for the micro- or nanofabrication of polymeric and metallic wires or tubules with interesting properties. It mainly relates to the development of nanoporous polycarbonate-based templates, and more precisely to pore-shape control in polycarbonate films, to the development of supported track-etch templates and to the feasibility of template patterning; recent results on the development of templates from polyimide support are also reported. Finally, some nanontaterial synthesis processes and properties are listed, with references to published papers. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:115 / 122
页数:8
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