Phase-change optical disk having a nitride interface layer

被引:64
作者
Yamada, N
Otoba, M
Kawahara, K
Miyagawa, N
Ohta, H
Akahira, N
Matsunaga, T
机构
[1] Matsushita Elect Ind Co Ltd, Opt Disk Syst Dev Ctr, Osaka 5708501, Japan
[2] Matsushita Technores Inc, Characterizat Technol Grp, Osaka 5708501, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 4B期
关键词
phase-change optical disk; Ge-Sb-Te; ZnS-SiO2; Ge-N interface layer; germanium nitride layer; Ge-N; barrier effect; diffusion of sulfur; cyclability; DVD-RAM;
D O I
10.1143/JJAP.37.2104
中图分类号
O59 [应用物理学];
学科分类号
摘要
A thin nitride layer formed at the interface of a Ge-Sb-Te recording layer and a ZnS-SiO2 protective layer successfully suppresses the phenomenon that reflectivity or signal amplitude becomes markedly small due to repented overwrites. Based on secondary ion mass spectrometry (SIMS) observations, the 5-nm-thick interface layer was found to restrain sulfur stems in the ZnS-SiO2 layer from diffusing into the Ge-Sb-Te layer and from changing the optical characteristics of the layer. Among several nitride materials, germanium nitride (Ge-N) sputtered film is found to have the most suitable properties as an interface layer: high barrier effect and good adhesiveness with Ge-Sb-Te and ZnS-SiO2 layers. The optical disk having the Ge-N interface layer achieves more than 5 x 10(5) cycles of overwrites with almost no changes in signal amplitude. reflectivity and jitter based on DVD-RAM specifications. The disk shows no degradation such as cracking, peeling, and corrosion after exposure to accelerated environmental conditions of 90 degrees C and 80% RH for 200 h.
引用
收藏
页码:2104 / 2110
页数:7
相关论文
共 8 条
[1]   NEW PHASE-CHANGE REWRITABLE OPTICAL-RECORDING FILM HAVING WELL SUPPRESSED MATERIAL FLOW FOR REPEATED REWRITING [J].
HIROTSUNE, A ;
MIYAUCHI, Y ;
TERAO, M .
APPLIED PHYSICS LETTERS, 1995, 66 (18) :2312-2314
[2]   LAND AND GROOVE RECORDING FOR HIGH TRACK DENSITY ON PHASE-CHANGE OPTICAL DISKS [J].
MIYAGAWA, N ;
GOTOH, Y ;
OHNO, E ;
NISHIUCHI, K ;
AKAHIRA, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (11B) :5324-5328
[3]   MULTIPULSE RECORDING METHOD FOR PULSE-WIDTH MODULATION RECORDING ON AN ERASABLE PHASE-CHANGE OPTICAL DISK [J].
OHNO, E ;
NISHIUCHI, K ;
ISHIBASHI, K ;
YAMADA, N ;
AKAHIRA, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (04) :677-681
[4]  
OHTA T, 1991, ODS TOP M, P84
[5]  
Wilson R. G., 1989, SECONDARY ION MASS S
[6]   Erasable phase-change optical materials [J].
Yamada, N .
MRS BULLETIN, 1996, 21 (09) :48-50
[7]   RAPID-PHASE TRANSITIONS OF GETE-SB2 TE3 PSEUDOBINARY AMORPHOUS THIN-FILMS FOR AN OPTICAL DISK MEMORY [J].
YAMADA, N ;
OHNO, E ;
NISHIUCHI, K ;
AKAHIRA, N ;
TAKAO, M .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (05) :2849-2856
[8]  
Yamaguchi J., 1987, Electrophotography, V26, P26