Fabrication of hybrid plastic-silicon micro-fluidic devices for individual cell manipulation by dielectrophoresis

被引：8

作者：

Chartier, I ^{[1
]}

Bory, C ^{[1
]}

Fuchs, A ^{[1
]}

Freida, D ^{[1
]}

Manaresi, N ^{[1
]}

Ruty, M ^{[1
]}

Bablet, J ^{[1
]}

Gilbert, K ^{[1
]}

Sarrut, N ^{[1
]}

Baleras, F ^{[1
]}

Villiers, C ^{[1
]}

Fulbert, L ^{[1
]}

机构：

[1] CEA, Leti, F-38054 Grenoble, France

来源：

MICROFLUIDICS, BIOMEMS, AND MEDICAL MICROSYSTEMS II | 2004年 / 5345卷

关键词：

cell chip; dielectrophoresis; single cell manipulation; micro-fluidic device; lab-on-a-Chip; mu TAS; polymer MEMS; hybrid device;

D O I：

10.1117/12.530705

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

During the last decade, world-wide developments in micro-fabrication technologies have led to numerous Lab-On-a-Chip (LOC) micro-systems covering a wide spectrum of biotechnological applications. Although early LOC developments were driven by glass and silicon micro-fabrication techniques, in recent years polymeric-based LOC have been intensively developed. Taking advantage of each material, a hybrid device associating an active silicon chip with a passive polymeric micropart has been developed to produce an addressable Cell-chip for individual cell manipulation and sorting. The complete hybrid micro-fluidic device fabrication is described here, including polymer structuring, hermetical sealing, biocompatibility studies, and fluidic interconnections with the sample as well as detection aspects. The cell manipulation is based on dielectrophoresis, which allows cell motion without fluid flow. First biological results will be presented.

引用

页码：7 / 16

页数：10

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