Sense determination of micropipes via grazing-incidence synchrotron white beam x-ray topography in 4H silicon carbide

被引:16
作者
Chen, Y. [1 ]
Dhanaraj, G.
Dudley, M.
Sanchez, E. K.
MacMillan, M. F.
机构
[1] SUNY Stony Brook, Dept Mat Sci & Engn, Stony Brook, NY 11794 USA
[2] Dow Corning Compound Semicond Solut, Midland, MI 48686 USA
关键词
D O I
10.1063/1.2772190
中图分类号
O59 [应用物理学];
学科分类号
摘要
Computer modeling using the ray-tracing method has been used to simulate the grazing-incidence x-ray topographic images of micropipes in 4H silicon carbide recorded using the pyramidal (11-28) reflection. Simulation results indicate that the images of micropipes appear as white features of roughly elliptical shape, canted to one side or other of the g vector depending on the dislocation sense. Observed images compare well with the simulations, demonstrating that the direction of cant provides a simple, nondestructive, and reliable way to reveal the senses of micropipes. Sense assignment has been validated using back-reflection reticulography. (C) 2007 American Institute of Physics.
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页数:3
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