Laser Chemical Processing (LCP) - A versatile tool for microstructuring applications

被引：64

作者：

Kray, D. ^{[1
]}

Fell, A. ^{[1
]}

Hopman, S. ^{[1
]}

Mayer, K. ^{[1
]}

Willeke, G. P. ^{[1
]}

Glunz, S. W. ^{[1
]}

机构：

[1] Fraunhofer Inst Solar Energy Syst ISE, D-79110 Freiburg, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2008年 / 93卷 / 01期

关键词：

42.62.-b; 42.60.By; 34.50.Lf;

D O I：

10.1007/s00339-008-4723-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Laser Chemical Processing (LCP) is presented as a novel microstructuring method for multiple applications. Via the combination of a chemical liquid jet and a laser beam, thermochemical and photochemical reactions can be initiated. Due to the free choice of the chemistry for the carrier liquid and the laser source, efficient processes can be devised for a large variety of applications. We present some examples for the microstructuring of silicon with the focus on etching, selective doping of phosphorous and the combination of etching and doping.

引用

页码：99 / 103

页数：5

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