Structural and optical properties of sol-gel derived aluminosilicate planar waveguides doped with Er3+ ions

被引:9
作者
Benatsou, M [1 ]
Capoen, B
Bouazaoui, M
Tchana, W
Vilcot, JP
机构
[1] Univ Lille 1, Spect Hertzienne Lab, URA CNRS 249, Ctr Etud Rech Lasers & Applicat, F-59655 Villeneuve Dascq, France
[2] Inst Elect & Microelect Nord, UMR CNRS 9929, F-59655 Villeneuve Dascq, France
关键词
sol-gel; aluminosilicate thin films; waveguides; erbium doping;
D O I
10.1023/A:1008666504990
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Er3+ doped-aluminosilicate thin films were prepared on silica and silica/Si substrates by the sol-gel process and dip-coating. The sol-gel aluminosilicate planar waveguides were prepared from silicon and aluminium alkoxides. Their structural characterization has been carried out by Raman spectroscopy, Atomic Force and Scanning Electron Microscopies. The results indicated that these films present an amorphous structure until an annealing temperature of 900 degrees C, while at temperatures higher than 1000 degrees C, crystallization occurs. An estimate of microcrystallite sizes using Raman spectroscopy is given, which agrees with data from scanning electron microscopy. The optical properties have been investigated by Fluorescence spectroscopy in the visible region.
引用
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页码:529 / 533
页数:5
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