PZT thin-film actuator driven micro optical scanning sensor by 3D integration of optical and mechanical devices

被引：14

作者：

Ikeda, M ^{[1
]}

Totani, H ^{[1
]}

Akiba, A ^{[1
]}

Goto, H ^{[1
]}

Matsumoto, M ^{[1
]}

Yada, T ^{[1
]}

机构：

[1] OMRON Corp, Cent R&D Lab, Tsukuba, Ibaraki 3004247, Japan

来源：

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年

关键词：

D O I：

10.1109/MEMSYS.1999.746868

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, a novel functional element integration method is proposed and demonstrated by highly miniaturized micro optical scanning sensor with dimensions of W2.0 x L4.0 x H2.8 mm(3). In the sensor as small as a wheat grain, the functional elements such as a laser diode(LD), photo detectors(PD's), a beam splitter, a ball lens, and a PZT thin-film actuator integrated optical scanner are integrated on separate substrates each consisting a functional module and the substrates are stacked And the sensor is capable of multi-optical sensing: the 2D object shape recognition (+/- 10 degs scanning area for two direction) and the range measurement (50 mm +/- 10 mm with 0.5 mm resolution).

引用

页码：435 / 440

页数：6