Fabrication of low-dimension CdSe structures by atomic layer epitaxy

被引:4
作者
Mikhaevich, DP [1 ]
Ezhovskii, YK [1 ]
机构
[1] St Petersburg State Technol Inst, St Petersburg, Russia
关键词
Cadmium; Selenide; Atomic Layer; Dielectric Matrix; Cadmium Selenide;
D O I
10.1023/B:RJAC.0000008283.91545.b7
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
Formation of thin cadmium selenide films on semiconductor and dielectric matrixes of (100) and (111) orientation from atomic-molecular beams was considered. Temperature ranges in which thin CdSe films are formed were determined. Conditions for layer-by-layer growth of nanostructures were established.
引用
收藏
页码:1197 / 1200
页数:4
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