Fabrication of LIGA mold insert using Ni-PTFE composite micro-electroforming

被引：5

作者：

Guo, Yuhua ^{[1
]}

Liu, Gang ^{[1
]}

Xiong, Ying ^{[1
]}

Zhu, Xuelin ^{[1
]}

Jun, Wang ^{[1
]}

Tian, Yangchao ^{[1
]}

机构：

[1] Univ Sci & Technol China, Natl Synchrotron Radiat Lab, Hefei 230029, Anhui, Peoples R China

来源：

INTERNATIONAL MEMS CONFERENCE 2006 | 2006年 / 34卷

关键词：

D O I：

10.1088/1742-6596/34/1/144

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The LIGA process, which combines deep X-ray lithography with electroforming and polymer molding, is a main fabrication method for producing MEMS. And hot embossing is one of the main processing techniques for polymer microfabrication, which helps the LIGA (UV-LIGA) technology to achieve low cost mass production. And electroforming of LIGA mold insert with lower surface energy and friction coefficient is required for demolding process during hot embossing to obtain better polymer replicas. In this paper, the Ni-PTFE compound material mold inserts is fabricated by special treated galvanic bath and operation conditions. And the results show that it is a robust Ni-PTFE composite micro-electroforming and basically changes the interaction property when demolding for producing high quality polymer replicas.

引用

页码：870 / 874

页数：5

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