Replication of refractive micro opto-mechanical components made with deep lithography with protons.

被引：15

作者：

Tuteleers, P ^{[1
]}

Vynck, P ^{[1
]}

Ottevaere, H ^{[1
]}

Debaes, C ^{[1
]}

Hermanne, A ^{[1
]}

Veretennicoff, I ^{[1
]}

Thienpont, H ^{[1
]}

机构：

[1] Free Univ Brussels, Dept Appl Phys & Photon, TW TONA, B-1050 Brussels, Belgium

来源：

DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001 | 2001年 / 4408卷

关键词：

deep lithography with protons; micro-optics; replication; micro-lens arrays; optical plastics; MOMS;

D O I：

10.1117/12.425343

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Deep Lithography with Protons (DLP) is a rapid prototyping technology for the fabrication of 3D micro-optical precision components. In this paper we will demonstrate how we made this DLP technology compatible with commercially available injection-molding and vacuum casting techniques, allowing to mass-replicate high-quality micro-optical modules at low cost. We will illustrate our technology by presenting optical characteristics of different refractive components made in optical-grade plastics such as polymethyl-methacrylate (PMMA), polycarbonate (PC) and semiconductor compatible plastics with high glass-transition temperatures such as COC.

引用

页码：329 / 337

页数：9