Amorphous and nanocrystalline sputtered Mg-Cu thin films

被引：34

作者：

Chou, H. S. ^{[1
]}

Huang, J. C. ^{[1
]}

Lai, Y. H. ^{[1
]}

Chang, L. W. ^{[1
]}

Du, X. H. ^{[1
,2
]}

Chu, J. P. ^{[3
]}

Nieh, T. G. ^{[4
]}

机构：

[1] Natl Sun Yat Sen Univ, Inst Mat Sci & Engn, Ctr Nanosci & Nanotechnol, Kaohsiung 804, Taiwan

[2] Shenyang Inst Aeronaut Engn, Dept Mat Engn, Shenyang 110034, Peoples R China

[3] Natl Taiwan Univ Sci & Technol, Dept Polymer Engn, Taipei 106, Taiwan

[4] Univ Tennessee, Dept Mat Sci & Engn, Knoxville, TN 37996 USA

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2009年 / 483卷 / 1-2期

关键词：

Thin films; Amorphous materials; Scanning and transmission electron microscopy; Intermetallics; MECHANICAL-PROPERTIES; METALLIC GLASSES; NANOINDENTATION; BEHAVIOR; CRYSTALLIZATION; DEFORMATION; INDENTATION; ALLOYS; FLOW; AL;

D O I：

10.1016/j.jallcom.2008.07.187

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Binary Mg-Cu amorphous alloys were first fabricated in 1980s via liquid quenching. In this study, the Mg1-xCux (x varying from 38 at.% to 82 at.%) partially amorphous thin films are prepared via co-sputtering. Upon thermal annealing, the Mg2Cu or MgCu2 nanocrystalline phases are induced in the Mg-rich or Cu-rich thin films, respectively. Due to the presence of fine nanocrystalline Mg2Cu or MgCu2 particles in the Mg-Cu amorphous matrix, the as-sputtered thin films show satisfactory Young's modulus similar to 100 GPa and hardness similar to 4 GPa. (C) 2008 Elsevier B.V. All rights reserved.

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页码：341 / 345

页数：5

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