A thermodynamic model for electrical current induced damage

被引:89
作者
Basaran, C [1 ]
Lin, MH [1 ]
Ye, H [1 ]
机构
[1] SUNY Buffalo, Dept Civil Struct & Environm Engn, Elect Packaging Lab, Buffalo, NY 14260 USA
关键词
electromigration; damage mechanics; solder joints; void growth; nanomechanics; diffusion; nanoelectronics;
D O I
10.1016/j.ijsolstr.2003.08.018
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
Electromigration-induced damage, which is in principal an irreversible mass diffusion under high current density, has been a concern for VLSI design for a long time. Miniaturization of electronic device sizes down to nano-scale will make electromigration a concern for all conducting components. This paper uses thermodynamics, statistical mechanics and mass transport (diffusion) principals to propose a model for electromigration process and a damage evolution model to quantify the degradation in microelectronics (and micro electromechanical system) solder joints subjected to high current densities. Entropy production in the system is used as a damage metric. The irreversible thermodynamic damage model utilized in this work has previously been successfully applied to thermo-mechanical fatigue of microelectronic solder joints. In this paper we extend this model to electromigration-induced degradation. Electromigration process is modeled by the atomic vacancy flux (mass diffusion) process. The proposed unified model is compared with several existing analytical and empirical models. A comparison of the damage evolution model proposed in here agrees well with empirical models proposed in the literature. (C) 2003 Elsevier Ltd. All rights reserved.
引用
收藏
页码:7315 / 7327
页数:13
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